Displacement measurement in vacuum chambers

| Information and Communication Technology

New feedthroughs for Eddy Current displacement sensors enable measurements in vacuum applications

New feedthroughs for Eddy Current displacement sensors enable measurements in vacuum applications

Precision sensor supplier Micro-Epsilon has introduced a new vacuum feedthrough for its eddyNCDT series of non-contact inductive displacement sensors. The new eddy/fB0/fB0/triax feedthrough allows the sensors to be used inside closed chambers for vacuum operation as well as providing a suitable conduit as a wall duct to place the sensor inside a vessel. A pluggable version is available for all common eddyNCDT sensors.

“The introduction of this new feedthrough, specifically for our Eddy Current sensors, opens up new possibilities for their use in vacuum applications and provides a much simpler way of getting the sensor signal through a chamber wall to the controller outside,” says Glenn Wedgbrow, Business Development Manager at Micro-Epsilon UK.

Non-contact, inductive displacement sensors from Micro-Epsilon operate using the eddy current measuring principle. Unlike conventional inductive displacement sensors, eddyNCDT sensors measure on ferromagnetic and non-ferromagnetic materials, providing high accuracy, frequency response and temperature stability. Due to their immunity to oil, dirt, pressure and temperature, the sensors are primarily used for integration in machines and OEM system applications.

Powerful controllers

The powerful eddyNCDT 3060/3070 inductive measuring systems are ideal for fast and precise displacement measurements. Equipped with a compact controller, a sensor and an integrated cable, these systems are factory-calibrated either for ferromagnetic or non-ferromagnetic materials or both. The systems are suitable for high precision displacement, distance, position, runout, extension, thermal expansion and oil film thickness measurements in harsh industrial environments.

The system is designed to work with the sub-miniature range of eddyNCDT sensors that offer measuring ranges from 0.4 mm to 8 mm and measure to sub-micron accuracies at a frequency response up to 20kHz.

The eddyNCDT 3060/3070 measuring systems are dust-proof and protected against immersion in water for a short period of time (IP67). The sensors are designed for ambient temperatures up to +180°C and ambient pressure up to 700 bar. Active temperature compensation is provided for the sensor and controller, which ensures high temperature stability of the complete measurement system.

The industrial-grade M12 Ethernet interface enables modern fieldbus connectivity. Due to the controller’s compact, die cast aluminium design and the fieldbus connection, the measurement system is suitable for integration into a variety of production plant, machines and systems. An easy-to-use web interface simplifies set up and configuration.

The DT3061/3071 controllers provide enhanced features such as five-point calibration, setting of switching and temperature outputs, as well as storage of multiple characteristic curves. If two or more systems operate next to each other, they do not need to be synchronised – a new frequency separation feature enables these systems to operate in parallel without influencing one another.

Typical applications include the measurement of shaft movement (lateral and axial runout), lubrication gap (oil film thickness), thermal expansion, and the monitoring of machines in high-speed, automated production environments. Furthermore, due to the controller’s storage feature for multiple characteristic curves, the system is highly suited to test bench, R&D and laboratory applications.

Jonathan Newell
Latest posts by Jonathan Newell (see all)

Related news

Read More News From Micro-Epsilon UK: