CyberOptics has been demonstrating its WaferSense Auto Resistance Sensor (ARS) with CyberSpectrum software.
The 300mm Auto Resistance Sensor (ARS) with CyberSpectrum software enables real-time resistance measurements of plating cell contacts in semiconductor Electrochemical Deposition (ECD) applications. The ARS quickly identifies and monitors resistance measurements with 50 separate pads around the perimeter using a Kelvin Sensing (4-wire resistance) method to detect residue affecting plating pins.
Process and equipment engineers in semiconductor fabs can predict when a tool needs maintenance with quantitative analysis of measured mean resistance over time, shorten equipment maintenance cycles and improve cell-to-cell uniformity with the wafer-like, 4-wire resistance sensor and CyberSpectrum software’s objective and repeatable data.
According to Dr Subodh Kulkarni of CyberOptics, the ARS can wirelessly capture and monitor real-time resistance measurements for the Electrochemical Deposition application in semiconductor fabs, saving time, expense as well as improving processes.